Ultrafast Laser Assisted Field Evaporation and Atom Probe Tomography Applications

Considering the recent developments of the pulsed laser in the femtosecond domain, the possibility of conceiving a new laser assisted Tomographic Atom Probe has been nvisaged. The instrument is able to map out the 3D distributions of the atomic positions in a The interest of the terial sciences has already been demonstrated many times [3,4]. However, since HV mples have to be electrically good conducting material. Thus, the 3DAP is really hy Applications B Gault, E Mottay, A Courjaud, 1 Groupe de Physique des Matériaux UMR CNRS 6634, Université de Rouen B.P. 12 76801 SAINT ETIENNE DU ROUVRAY CEDEXFrance 2 AMPLITUDE SYSTEMES Domaine du Haut Carré 351, Cours de la Libération 33400 Talence – France E-Mail : [email protected] e volume about 20 20 200 nm. By combining a standard atom probe to a femtosecond laser, it is possible to obtain excellent atom probe performances. The mass resolving power of the instrument is increased by a factor 3. The feasibility of a laser assisted Tomographic Atom Probe is thus demonstrated in conductive and non conductive materials.